Fundamentals of die-level assembly techniques for phase-only liquid crystal on silicon devices

被引：0
|
作者：
Zhang, Zi-Chen [1 ]
You, Zheng [1 ]
机构：
[1] Collaborative Innovation Center for Micro/Nano Fabrication, Device and System, Department of Precision Instrument, Tsinghua University, Beijing,100084, China
来源：
Tien Tzu Hsueh Pao/Acta Electronica Sinica | 2015年 / 43卷 / 11期
关键词：
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
D O I：
10.3969/j.issn.0372-2112.2015.11.027
中图分类号：
学科分类号：
摘要：
Silicon - Inspection - Assembly - Gluing - Liquid crystals - Glues - Deposition
引用
收藏
页码：2322 / 2330
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