共 50 条
- [1] Performance of large scale MEMS-based optical crossconnect switches 2002 IEEE/LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2, 2002, : 411 - 412
- [2] Design of MEMS-based microwave and millimeterwave switches for high power applications 2003 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOLS 1 AND 2, PROCEEDINGS, 2003, : 61 - 64
- [5] Large-scale Silicon Photonic Switches with MEMS 2017 IEEE PHOTONICS SOCIETY SUMMER TOPICAL MEETING SERIES (SUM), 2017,
- [6] Design and Analysis of MEMS-based Actuator MANUFACTURING SCIENCE AND ENGINEERING, PTS 1-5, 2010, 97-101 : 3471 - +
- [7] MEMS-Based Nanomechanics: Influence of MEMS Design on Test Temperature Experimental Mechanics, 2012, 52 : 607 - 617
- [9] MEMS-based nanomechanics: Influence of MEMS design on test temperature Proceedings of the Society for Experimental Mechanics, Inc., 2012, 52 (01): : 607 - 617
- [10] Design and Evaluation of a MEMS-Based Stirling Microcooler JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME, 2013, 135 (11):