Nanosize structure of sputter-deposited tungsten carbide thin films

被引:0
|
作者
Dubček, P. [1 ]
Radić, N. [1 ]
Bernstorff, S. [2 ]
Salamon, K. [3 ]
Milat, O. [3 ]
机构
[1] Rudjer Bošković Inst., POBox 180, 10000 Zagreb, Croatia
[2] Sincrotrone Trieste, SS 14km, 163,5, 34012 Basovizza(TS), Italy
[3] Institute of Physics, Bijenička 46, 10000 Zagreb, Croatia
来源
Diffus Def Data Pt B | 1600年 / 251-254期
关键词
Compendex;
D O I
Proceedings of Symposium F European Materials Research Society Fall Meeting 2003
中图分类号
学科分类号
摘要
Charge coupled devices - Composition - Diffusion - Electromagnetic wave scattering - Magnetron sputtering - Nanostructured materials - Synchrotron radiation - Tungsten carbide - X ray spectroscopy
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