Research on the Lagrange-model of MEMS microwave power sensor

被引：0
|
作者：
Zhang H. [1 ]
Dai R. [1 ]
Lu H. [1 ]
Bai X. [1 ]
Wang D. [1 ]
机构：
[1] College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing
来源：
Wang, Debo (wdb@njupt.edu.cn) | 2018年 / Science Press卷 / 39期
关键词：
Lagrange-model; Micro-electro-mechanical system (MEMS); Power sensor; Sensitivity;
D O I：
10.19650/j.cnki.cjsi.J1803290
中图分类号：
学科分类号：
摘要：
In order to improve the comprehensive performance of the thermoelectric micro-electro-mechonical system (MEMS) microwave power sensor, the theoretical analysis model of sensitivity, noise figure and time constant is established based on the distance between thermopile and load resistance, the length and number of thermopile. Firstly, according to the theoretical analysis model, the limits of time constant and noise figure on the sensitivity are obtained. Then, the sensitivity optimization analysis model is built under the restriction of specific noise figure and time constant based on the lagrange-multiplier method. Finally, using the established sensitivity optimization model, the length and number of thermocouple and the distance between the load resistance and thermopile are obtained corresponding to the maximum sensitivity of the thermocouple MEMS microwave power sensor. Experiments show that the sensitivity characteristics of the designed sensor based on the structural parameters is improved significantly, compared with the sensors with traditional structure. Therefore, the proposed analytical model of sensitivity optimization based on lagrange-multiplier method can provide certain reference and guide for the research of thermoelectric MEMS microwave power sensor © 2018, Science Press. All right reserved.
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页码：110 / 117
页数：7
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