Test methods for materials used in micro-engineering

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Adelheim, C.
Aktaa, J.
Feit, K.
Rohde, M.
Zimmermann, H.
Zum Gahr, K.-H.
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| 2000年 / Eugen G. Leuze Verlag, Saulgau, Germany卷 / 91期
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As a result of trends leading to greater miniaturization in micro-engineering, many of the long-established test methods are either totally inapplicable or at least not well-suited to the task in hand. A range of new test methods are therefore being developed, capable of assessing the mechanical, tribological and thermophysical properties as well as the chemical compositions of micro-components. Data obtained from such tests is essential in maintaining the quality and reproducibility of the manufacturing process. These parameters also serve to specify and to optimize micro-components. Among the most important parameters are included friction and wear as well as thermophysical properties. However a knowledge of composition at a micro-level is also vital in achieving the desired properties. This calls for analytical procedures which are suitable to the task in hand and capable of being used at a precision level.
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