In situ nanoindentation mechanical property of films by atomic force microscope

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作者
Du, Yuanming [1 ,2 ]
Zhang, Yuefei [2 ]
Zhang, Changhui [2 ]
Liu, Yanping [1 ]
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[1] Taiyuan University of Technology, Taiyuan,030024, China
[2] Institute of Microstructure and Properties of Advanced Materials, Beijing University of Technology, Beijing,100124, China
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页码:1959 / 1963
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