Slurry Utilization Efficiency Studies in Chemical Mechanical Planarization

被引：0
|
作者：
Philipossian, Ara [1 ]
Mitchell, Erin [1 ]
机构：
[1] Department of Chemical Engineering, University of Arizona, Tucson, AZ 85721, United States
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2003年 / 42卷 / 12期
关键词：
Chemical mechanical planarization (CMP) - Coefficient of friction (COF) - Slurry utilization efficiency;
D O I：
10.1143/jjap.42.7259
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：7259 / 7264
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