Research on computer-aided alignment based on vector aberration theory

被引：0
|
作者：
Che, Chi-Cheng [1 ,2 ]
Li, Ying-Cai [1 ]
Fan, Xue-Wu [1 ]
Ma, Zhen [1 ,2 ]
Hu, Yong-Ming [1 ]
机构：
[1] Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an 710119, China
[2] Graduate University, Chinese Academy of Sciences, Beijing 100039, China
来源：
Guangzi Xuebao/Acta Photonica Sinica | 2008年 / 37卷 / 08期
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页码：1630 / 1634
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