Real-time Direct Temperature Estimation of MEMS Resonators Through Indirect Q-factor Measurement

被引：0
|
作者：
Kim, Hak-Ju [1 ]
Jang, Woo-Hyeop [2 ]
Jung, Hyoung-Kyoon [2 ]
机构：
[1] R&D Division, Microinfinity Co.,Ltd, Korea, Republic of
[2] Sensor Advanced Development Center, Microinfinity Co.,Ltd, Korea, Republic of
来源：
Journal of Institute of Control, Robotics and Systems | 2024年 / 30卷 / 08期
关键词：
MEMS resonators - Q-factor measurements - Q-factors - Quality factors - Real- time - Silicon MEMS - Silicon MEMS resonator - Temperature estimation - Temperature hysteresis - Temperature variation;
D O I：
10.5302/J.ICROS.2024.24.0066
中图分类号：
学科分类号：
摘要：
8
引用
收藏
页码：848 / 852
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