Downstream plasma transport and metal ionization in a high-powered pulsed-plasma magnetron

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20142517851621
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[1] Meng, Liang
[2] 1,Yu, He
[3] Szott, Matthew M.
[4] McLain, Jake T.
[5] Ruzic, David N.
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| 1600年 / American Institute of Physics Inc.卷 / 115期
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