Current status and future prospects of nanoimprint technology

被引：0
|
作者：
Hirai Y.
机构：
来源：
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 2020年 / 86卷 / 04期
关键词：
3D structure; Lithography; Mold; Nano fabrication; Nanoimprint;
D O I：
10.2493/jjspe.86.243
中图分类号：
学科分类号：
摘要：
[No abstract available]
引用
收藏
页码：243 / 246
页数：3
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