Removal of nano-sized surface particles by CO2 gas cluster collisions for dry cleaning

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作者：
Cho, Yujin [1 ]
Choi, Hoomi [2 ]
Mo, Sungwon [3 ]
Kim, Taesung [1 ]
机构：
[1] School of Mechanical Engineering, Sungkyunkwan University, Korea, Republic of
[2] Manufacturing Engineering Team, Samsung Electronics, Korea, Republic of
[3] R&D Division, ZEUS Corporation, Korea, Republic of
来源：
Microelectronic Engineering | 2020年 / 234卷
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