Temperature characteristics analysis and frequency drift compensation for MEMS resonators

被引：0
|
作者：
Liu, Heng [1 ]
Guo, Yueyuan [1 ]
Zhang, Yu [1 ]
机构：
[1] School of Electronic &Information Engineering, Nanjing University of Information Science & Technology, Nanjing,210044, China
来源：
Zhongguo Guanxing Jishu Xuebao/Journal of Chinese Inertial Technology | 2023年 / 31卷 / 03期
关键词：
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Elastic moduli - Error compensation - Radial basis function networks
引用
收藏
页码：275 / 281
相关论文
共 50 条
  • [1] Noise Characteristics of MEMS Gyro's Null Drift and Temperature Compensation
    Shiau, Jaw-Kuen
    Huang, Chen-Xuan
    Chang, Ming-Yu
    JOURNAL OF APPLIED SCIENCE AND ENGINEERING, 2012, 15 (03): : 239 - 246
  • [2] Analysis of Frequency Drift of Silicon MEMS Resonator with Temperature
    Jiang, Bo
    Huang, Shenhu
    Zhang, Jing
    Su, Yan
    MICROMACHINES, 2021, 12 (01) : 1 - 10
  • [3] Analysis and compensation of MEMS gyroscope drift
    Diao, Zhanlin
    Quan, Haiyang
    Lan, Lidong
    Han, Yifei
    2013 SEVENTH INTERNATIONAL CONFERENCE ON SENSING TECHNOLOGY (ICST), 2013, : 592 - 596
  • [4] Temperature Compensation of Silicon MEMS Resonators by Heavy Doping
    Pensala, Tuomas
    Jaakkola, Antti
    Prunnila, Mika
    Dekker, James
    2011 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2011, : 1952 - 1955
  • [5] ANALYSIS OF FREQUENCY-TEMPERATURE CHARACTERISTICS OF QUARTZ RESONATORS
    ALTSHULL.GB
    PARFENOV, BG
    TELECOMMUNICATIONS AND RADIO ENGINEER-USSR, 1967, (08): : 118 - &
  • [6] Lateral Diffusion Doping of Silicon for Temperature Compensation of MEMS Resonators
    Shin, Dongsuk D.
    Heinz, David B.
    Kwon, Hyun-Keun
    Chen, Yunhan
    Kenny, Thomas W.
    2018 5TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS & SYSTEMS (INERTIAL 2018), 2018, : 125 - 128
  • [7] Influence of packaging on frequency drift in MEMS resonators -Dynamic effect of packaging on MEMS device performance -
    Nishida, T.
    Higo, Y.
    Tanigawa, H.
    Suzuki, K.
    2014 IEEE CPMT SYMPOSIUM JAPAN (ICSJ), 2014, : 142 - 145
  • [8] Temperature Drift Compensation of a MEMS Accelerometer Based on DLSTM and ISSA
    Guo, Gangqiang
    Chai, Bo
    Cheng, Ruichu
    Wang, Yunshuang
    SENSORS, 2023, 23 (04)
  • [9] Frequency-temperature analysis of MEMS AT-cut quartz resonators.
    Yong, YK
    Vig, J
    Ballato, A
    Kubena, R
    Closkey, RM
    PROCEEDINGS OF THE 2003 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM & PDA EXHIBITION JOINTLY WITH 17TH EUROPEAN FREQUENCY AND TIME FORUM, 2003, : 1095 - 1099
  • [10] Electronic Temperature Compensation of Clamped-Clamped Beam MEMS Resonators
    Zadeh, S. A. Gorji
    Saha, T.
    Allidina, K.
    Nabki, F.
    El-Gamal, M. N.
    53RD IEEE INTERNATIONAL MIDWEST SYMPOSIUM ON CIRCUITS AND SYSTEMS, 2010, : 1193 - 1196
12345