Effect of carrier acceleration on response of electrostatically driven MEMS gyroscope

被引：0
|
作者：
Zhang L. [1 ,2 ]
Zhang H. [3 ]
Li X. [1 ]
Wang Y. [1 ]
Yu T. [1 ]
机构：
[1] School of Mechanical Engineering, Hebei University of Technology, Tianjin
[2] College of Automotive & Transportation, Tianjin University of Technology and Education, Tianjin
[3] School of Mechanical Engineering, Tianjin University of Commerce, Tianjin
来源：
Zhendong yu Chongji/Journal of Vibration and Shock | 2021年 / 40卷 / 05期
关键词：
Carrier acceleration; MEMS gyroscope; Nonlinear electrostatic force; Nonlinear stiffness; Periodic response;
D O I：
10.13465/j.cnki.jvs.2021.05.008
中图分类号：
学科分类号：
摘要：
Carrier motion may cause variation of a MEMS gyroscope's response, and measurement error and even system failure. Here, effects of carrier motion on response of a MEMS gyroscope were studied. Considering carrier motion, nonlinear support stiffness and nonlinear electrostatic force of a MEMS gyroscope, the dynamic equation of the system was established based on Lagrange equation. The periodic response of the system with fractional nonlinear term was solved using the harmonic balance method combined with the residue theorem. Effects of carrier acceleration on response characteristics of the system were studied. It was shown that the carrier acceleration in driving direction can reduce the sensitivity of the system; the carrier acceleration in detecting direction can not only reduce the system sensitivity but also cause zero bias, zero bias is proportional to the magnitude of the acceleration in detecting direction, and this proportional relation is independent of drive voltage; when driving voltage is smaller, lower carrier acceleration in detecting direction has little effect on the system sensitivity and nonlinearity; when driving voltage or carrier acceleration in detecting direction is larger, the system sensitivity drops sharply, and its nonlinearity changes dramatically. © 2021, Editorial Office of Journal of Vibration and Shock. All right reserved.
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页码：55 / 62
页数：7
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