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Automated frequency and quality-factor matching method for frequency modulated / rate integrating gyroscope

被引：0
|
作者：
Tsukamoto T. [1 ]
Member S.T. [1 ]
Member S. [1 ]
机构：
[1] Department of Robotics, Tohoku University, 6-6-01, Aramaki Aza Aoba, Aoba-ku, Sendai
来源：
IEEJ Transactions on Sensors and Micromachines | 2019年 / 139卷 / 08期
关键词：
Degenerated resonator; Frequency modulated gyroscope; MEMS gyroscope; Mode matching; Rate integrating (whole angle) gyroscope;
D O I：
10.1541/ieejsmas.139.219
中图分类号：
学科分类号：
摘要：
This paper reports an automated tuning method for a frequency modulated / rate integrating gyroscope (FM/RIG). The frequency and quality factor mismatches in a MEMS resonator cause the mode-coupling, thus degrade the accuracy of the gyroscope. The X-Y phase difference and amplitude ratio of driving signals are used as the tuning parameters for the mismatch compensation. An automated tuning method based on the relationship between those tuning parameters and mode-coupling terms were developed. Using the proposed method, the mode-coupling effect, which comes from the freqnency and quality factor mismatch, could be 3 orders of magnitude smaller than the non-compensated one. © 2019 The Institute of Electrical Engineers of Japan.
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页码：219 / 224
页数：5
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