International Conference on Micro- and Nano-Electronics 2021

被引：0
|
作者：
Lukichev, Vladimir F. [1 ]
Rudenko, Konstantin V. [1 ]
机构：
[1] Valiev Institute of Physics and Technology, Russian Academy of Sciences, Russia
来源：
Proceedings of SPIE - The International Society for Optical Engineering | 2022年 / 12157卷
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D O I：
10.1117/12.2629041
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