Measurement of micro-displacement based on the interference of vortex beams and spherical wave

被引：0
|
作者：
Zhao D. [1 ,2 ]
Wang S. [1 ]
Ma Y. [1 ]
Zhang B. [1 ,2 ]
Li N. [1 ]
Li Y. [1 ,2 ]
Chu W. [1 ,2 ]
机构：
[1] School of Information and Communication Engineering, North University of China, Taiyuan
[2] State Key Laboratory of Electronic Testing Technology, North University of China, Taiyuan
来源：
Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering | 2020年 / 49卷 / 04期
关键词：
Micrometric displacement; Spatial light modulator; Spiral phase; Vortex beam;
D O I：
10.3788/IRLA202049.0413005
中图分类号：
学科分类号：
摘要：
Based on the theory of vortex beams and spherical wave interference, an optical measurement method for object micro-displacement was proposed. After improving the Mach-Zehnder interference optical path, a vortex beam was generated as a reference beam, using the spatial light modulator illuminated by a beam of light, and another beam was transformed into a spherical wave through the lens and illuminated to the object. The interference fringes were distributed in a spiral shape as the two beams interfered. When the object has a micro-displacement, the optical path difference of the two beams changes, and the spiral interference fringe rotates. Noticing this phenomenon, the micro-displacement of the object can be determined by the rotation angle of the spiral interference which vortex beams interference with spherical wave. Through theoretical analysis, simulation and experiments have proved that the micro-displacement of the object can be monitored in real time, and effectively calculated by the rotation angle change of spiral fringe based on interference of vortex beams and spherical wave. In the experiment, the displacement of the measured object is 27 nm, the actual measured displacement of the object is 25.75 nm, and the error is 1.25 nm compared with the theoretical value. © 2020, Editorial Board of Journal of Infrared and Laser Engineering. All right reserved.
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