Closed-loop inverse iterative learning control in frequency-domain for electromagnetic driven compliant micro-positioning platform

被引：0
|
作者：
Zhang X. [1 ]
Lai L.-J. [1 ]
Li P.-Z. [2 ,3 ]
Zhu L.-M. [4 ]
机构：
[1] School of Mechanical and Automotive Engineering, Shanghai University of Engineering Science, Shanghai
[2] Changchun Institute of Optic, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun
[3] School of Computing and Engineering, University of Gloucestershire, Cheltenham
[4] State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2021年 / 29卷 / 09期
关键词：
Compliant mechanism; Frequency-domain inverse iteration; Micro-positioning stage; Phase-lead; Voice coil motor;
D O I：
10.37188/OPE.20212909.2149
中图分类号：
学科分类号：
摘要：
To overcome the problems of low damping resonance and different dynamics properties in the large-range compliant micro-positioning stage driven by a voice coil motor, a compound closed-loop frequency-domain inverse iterative learning control method based on data-driven frequency-domain inverse iterative feedforward compensation and PI feedback control with phase-lead compensation is used for high-speed and high-precision control. First, the micro-positioning stage with a double-parallelogram flexure mechanism driven by a voice coil motor is built, and a dynamics model is identified for different working positions. Then, a PI feedback controller with phase-lead compensation is designed to improve the relative stability of the positioning system. Input and output data are then used for online inverse estimation of the system frequency response function, which can be used as feedforward compensation to further eliminate the resonance effect. Finally, tracking experiments are conducted using the proposed control method, which is then compared with other methods. Experimental results show that the maximum tracking error for the triangular trajectory using the proposed control method is 0.175%. Compared with a PID control, phase-leading PI control, and transfer function inverse feedforward control, the root mean square errors of tracking are reduced by 8.75, 5.43, and 2.21 times, respectively, which can better meet the requirements of high tracking accuracy, fast speed, and strong anti-interference ability of large stroke micro/nano-positioning. © 2021, Science Press. All right reserved.
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页码：2149 / 2157
页数：8
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