Polarized laser scattering detection method for subsurface microcracks in quartz glass

被引：1
|
作者：
Lü Q. [1 ]
Shi F. [1 ]
Bai Q. [1 ]
Jiang X. [2 ]
Jiang L. [2 ]
机构：
[1] Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian
[2] 707 Research Institute of CSSC, Tianjin
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2023年 / 31卷 / 14期
关键词：
grinding; indentation; polarized laser scattering; quartz glass; subsurface microcrack;
D O I：
10.37188/OPE.20233114.2031
中图分类号：
学科分类号：
摘要：
Subsurface microcracking is an unavoidable consequence of the quartz glass grinding process，and it significantly affects the service performance of optical components. Therefore，nondestructive detec‑ tion of subsurface microcracks in quartz glass is crucial for grinding process optimization. Accordingly，herein，a polarized laser scattering（PLS）-based method for detecting subsurface microcracks in quartz glass was developed. For this，a PLS nondestructive inspection platform was established. Indentation specimens with subsurface microcrack depths of 5. 27，9. 7，and 15. 42 µm were prepared via indentation experiments at pressure values of 20，50，and 100 mN，respectively. Furthermore，ground specimens with subsurface microcrack depths ranging from 1-10 µm were prepared via grinding with different abrasive particle sizes（1-20 µm）. A power function relationship between the PLS detection signal and subsurface crack depth was discovered. The developed PLS detection system effectively detected and quantified sub‑ surface microcracks with depths less than 10 µm. Thus，the developed PLS detection system enables mi‑ crocrack detection in ground quartz glass，providing valuable guidance for subsurface microcrack control and process optimization. © 2023 Chinese Academy of Sciences. All rights reserved.
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页码：2031 / 2039
页数：8
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