Design of rigid motion and elastic deformation parallel driven based macro-micro compounded positioning stage

被引：0
|
作者：
Bai, Youdun [1 ]
Chen, Xin [1 ]
Yang, Zhijun [1 ]
机构：
[1] Guangdong Provincial Key Laboratory of Micro-Nano Manufacturing Technology and Equipment, State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou,510006, China
来源：
Zhongguo Kexue Jishu Kexue/Scientia Sinica Technologica | 2019年 / 49卷 / 06期
关键词：
D O I：
10.1360/N092017-00397
中图分类号：
学科分类号：
摘要：
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页码：669 / 680
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