Mechanical properties, thermal stability and oxidation resistance of HfC/a-C:H films deposited by HiPIMS

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作者：
Luo, Huan [1 ]
Sun, Hui [2 ]
Gao, Fei [3 ]
Billard, Alain [1 ]
机构：
[1] FEMTO-ST, UMR 6174 CNRS, MN2S, Univ. Bourgogne Franche-Comté, UTBM, Site de Montbéliard, Belfort Cedex,90000, France
[2] Shandong Key Laboratory of Optical Astronomy and Solar-Terrestrial Environment, School of Space Science and Physics, Shandong University, Weihai,Shandong,264209, China
[3] FEMTO-ST, UMR 6174 CNRS, Energy Department, Univ. Bourgogne Franche-Comté, UTBM, Rue Thierry Mieg, Belfort Cedex,90000, France
来源：
Journal of Alloys and Compounds | 2021年 / 847卷
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