共 32 条
- [1] Zhu W.L., Yang X., Duan F., Et al., Design and adaptive terminal sliding mode control of a fast tool servo system for diamond machining of freeform surfaces, IEEE Transactions on Industrial Electronics, 66, 6, pp. 4912-4922, (2019)
- [2] Dsouza R.D., Navin K.P., Theodoridis T., Et al., Design, fabrication and testing of a 2 DOF compliant flexural microgripper, Microsystem Technologies, 24, 9, pp. 3867-3883, (2018)
- [3] Kim M., Park C., Je S., Et al., Real-time compensation of simultaneous errors induced by optical phase difference and substrate motion in scanning beam laser interference lithography system, IEEE/ASME Transactions on Mechatronics, 23, 4, pp. 1491-1500, (2018)
- [4] Wang Y., Wu S., Xu L., Et al., A new precise positioning method for piezoelectric scanner of AFM, Ultramicroscopy, 196, pp. 67-73, (2019)
- [5] Xu S., Zhu X., Dong Z., Et al., Nonlinear modeling and analysis of compliant mechanisms with circular flexure hinges based on quadrature beam elements, Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, 233, 9, pp. 3277-3285, (2019)
- [6] Choi K.B., Lee J.J., Kim G.H., Et al., Amplification ratio analysis of a bridge-type mechanical amplification mechanism based on a fully compliant model, Mechanism and Machine Theory, 121, pp. 355-372, (2018)
- [7] Wang J.P., Jin J.M., Zhao C.S., Asynchronous bundling of linear ultrasonic motor for precision positioning stage, Opt. Precision Eng., 19, 11, pp. 2693-2702, (2011)
- [8] Hu J.F., Yang Z.H., A novel inchworm linear micro actuator, Opt. Precision Eng., 26, 1, pp. 122-131, (2018)
- [9] Liu J., Liu Y., Zhao L., Et al., Design and experiments of a single-foot linear piezoelectric actuator operated in a stepping mode, IEEE Transactions on Industrial Electronics, 65, 10, pp. 8063-8071, (2018)
- [10] Shi Y.L., Lou C.S., Zhang J., Et al., Small precision motion of platform based on stick-slip driving principle, Opt. Precision Eng., 26, 5, pp. 1124-1132, (2018)