Composite control of piezo-actuated stick-slip devices

被引:0
|
作者
Xu S.-Q. [1 ]
Zhu X.-B. [1 ]
Liu P.-K. [1 ]
机构
[1] School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai
关键词
Active damping; Composite control; Micro-motion stage; Piezo-electric actuate;
D O I
10.3788/OPE.20192712.2571
中图分类号
学科分类号
摘要
A piezo-actuated stick-slip device, which consists of a micro-motion stage and a slider, can realize long-range motions with high resolution. Induced mechanical vibrations in the micro-motion stage impose an upper bound on the speed of the piezo-actuated stick-slip device. To address this issue, this study proposes a composite control scheme with active damping. First, the saw-tooth wave signal is filtered and made smoother. Then, a delayed position feedback controller is introduced to improve the damping of the micro-motion stage and mitigate its vibrations. Both tracking and feedforward controllers are designed to reduce the tracking errors and increase the control bandwidth. Finally, the proposed controller is implemented on the prototype of a piezo-actuated stick-slip rotational device. The experimental results show that, compared to a proportional integral controller, the proposed controller improves the control bandwidth from 32.7 to 1 466.5 Hz. In addition, compared to a conventional feedforward controller, the proposed controller under a 100-Hz saw-tooth wave signal with a duty cycle of 0.2 improves the angular velocity of the slider from 3.52 to 9.03 mrad/s. The device angular speed is improved significantly. © 2019, Science Press. All right reserved.
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页码:2571 / 2580
页数:9
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共 32 条
  • [1] Zhu W.L., Yang X., Duan F., Et al., Design and adaptive terminal sliding mode control of a fast tool servo system for diamond machining of freeform surfaces, IEEE Transactions on Industrial Electronics, 66, 6, pp. 4912-4922, (2019)
  • [2] Dsouza R.D., Navin K.P., Theodoridis T., Et al., Design, fabrication and testing of a 2 DOF compliant flexural microgripper, Microsystem Technologies, 24, 9, pp. 3867-3883, (2018)
  • [3] Kim M., Park C., Je S., Et al., Real-time compensation of simultaneous errors induced by optical phase difference and substrate motion in scanning beam laser interference lithography system, IEEE/ASME Transactions on Mechatronics, 23, 4, pp. 1491-1500, (2018)
  • [4] Wang Y., Wu S., Xu L., Et al., A new precise positioning method for piezoelectric scanner of AFM, Ultramicroscopy, 196, pp. 67-73, (2019)
  • [5] Xu S., Zhu X., Dong Z., Et al., Nonlinear modeling and analysis of compliant mechanisms with circular flexure hinges based on quadrature beam elements, Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, 233, 9, pp. 3277-3285, (2019)
  • [6] Choi K.B., Lee J.J., Kim G.H., Et al., Amplification ratio analysis of a bridge-type mechanical amplification mechanism based on a fully compliant model, Mechanism and Machine Theory, 121, pp. 355-372, (2018)
  • [7] Wang J.P., Jin J.M., Zhao C.S., Asynchronous bundling of linear ultrasonic motor for precision positioning stage, Opt. Precision Eng., 19, 11, pp. 2693-2702, (2011)
  • [8] Hu J.F., Yang Z.H., A novel inchworm linear micro actuator, Opt. Precision Eng., 26, 1, pp. 122-131, (2018)
  • [9] Liu J., Liu Y., Zhao L., Et al., Design and experiments of a single-foot linear piezoelectric actuator operated in a stepping mode, IEEE Transactions on Industrial Electronics, 65, 10, pp. 8063-8071, (2018)
  • [10] Shi Y.L., Lou C.S., Zhang J., Et al., Small precision motion of platform based on stick-slip driving principle, Opt. Precision Eng., 26, 5, pp. 1124-1132, (2018)