Three-dimensional measurement system based on full-field heterodyne interferometry

被引：4
|
作者：
Shang, Wan-Qi [1 ,2 ]
Zhang, Wen-Xi [1 ,2 ]
Wu, Zhou [1 ,2 ]
Li, Yang [1 ,2 ]
Kong, Xin-Xin [1 ]
机构：
[1] Key Laboratory of Computational Optical Imaging Technology, Chinese Academy of Sciences, Beijing,100094, China
[2] School of Optoelectronics, University of Chinese Academy of Sciences, Beijing,100049, China
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2019年 / 27卷 / 10期
关键词：
D O I：
10.3788/OPE.20192710.2097
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：2097 / 2104
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