Ultra-precision measurement: The cornerstone of the lithography development

被引：0
|
作者：
Tan J. [1 ]
机构：
[1] School of Instrument Science and Engineering, Harbin Institute of Technology, Harbin
来源：
Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument | 2023年 / 44卷 / 03期
关键词：
industrial measurement system; lithography machine; measurement and testing center; metrology system; ultra-precision measurement;
D O I：
10.19650/j.cnki.cjsi.J2311303
中图分类号：
学科分类号：
摘要：
The lithography machine represents the pinnacle of advanced equipment. The ultra-precision measurement is crucial to supporting the research, development, and manufacturing of these products, ensuring the precision and quality of the manufacturing process. This article provides an overview of the lithography industry′s characteristics and development trends, and explores the role of ultra-precision measurement in advancing lithography machine technology, examining its impact on components, subsystems, whole machine integration, and overall performance. The article also considers ways to enhance the precision capabilities of lithography machine products and the need to establish an ultra-precision measurement system, including an industrial measurement system to control the quality of ultra-precision lithography machine products and a metrology system to ensure measurement accuracy and reliability. Finally, the article proposes the necessity of establishing a measurement and testing center for the lithography machine industry. © 2023 Science Press. All rights reserved.
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页码：1 / 7
页数：6
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