A New Atmospheric Pressure Microwave Plasma Source (APMPS)

被引：0
|
作者：
刘亮 [1 ]
张贵新 [1 ]
李银安 [2 ]
朱志杰 [1 ]
王新新 [1 ]
罗承沐 [1 ]
机构：
[1] Department of Electrical Engineering and Applied Electronic Technology, Tsinghua University, Beijing , China
[2] Institute of Physics, Chinese Academy of Sciences, Beijing ,
来源：
Plasma Science and Technology. | 2008年 / 10卷 / 01期
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摘要：
<正> An atmospheric pressure microwave plasma source (APMPS) that can generate alarge volume of plasma at an atmospheric pressure has been developed at Tsinghna University.This paper presents the design of this APMPS,the theoretical consideration of microwave plasmaignition and the simulation results,including the distributions of the electric field and powerdensity inside the cavity as well as the accuracy of the sinmlation results.In addition,a methodof producing an atmospheric pressure microwave plasma and some relevant observations of theplasma are also provided.It is expected that this research would be useful for further developingatmospheric pressure microwave plasma sources and expanding the scope of their applications.
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页数：6
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