Study of the Discharge Mode in Micro-Hollow Cathode

被引：0

作者：

何锋 ^{[1
]}

何寿杰 ^{[1
,2
]}

赵晓菲 ^{[1
]}

郭滨刚

欧阳吉庭 ^{[1
]}

机构：

[1] chool of Physics,Beijing Institute of Technology

[2] College of Physics Science and Technology,Hebei

来源：

Plasma Science and Technology | 2012年 / 14卷 / 12期

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D O I：

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学科分类号：

摘要：

In this study, micro-hollow cathode discharge (MHCD) is investigated by a fluid model with drift-diffusion approximation. The MHC device is a cathode/dielectric/anode sandwich structure with one hole of a diameter D=200 μm. The gas is a Ne/Xe mixture at a pressure p=50～500 Torr. The evolutions of the discharge show that there are two different discharge modes. At larger pD the discharge plasma and high density excited species expand along the cathode surface and, a ringed discharge mode is formed. At smaller pD, the discharge plasma and the excited species expand along the axis of the cathode aperture to form a columnar discharge.

引用

页码：1079 / 1083

页数：5

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