Diagnosis of Hydrogen Plasma in a Miniature Penning Ion Source by Double Probes

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作者：
金大志 [1 ]
杨中海 [1 ]
肖坤祥 [2 ]
戴晶怡 [2 ]
机构：
[1] School of Physical Electronics,University of Electronic Science and Technology of China
[2] Institute of Electronic Engineering,China Academy of Engineering
来源：
Plasma Science and Technology. | 2009年 / 11卷 / 01期
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摘要：
<正> Parameters of hydrogen plasma in a miniature Penning discharge ion source,in-eluding the electron temperature and the electron density,were measured by using double probes.The results indicate that the electron density increases and the electron temperature decreaseswith the increase in gas pressure and the discharge current.The electron temperature is about5～9 eV and the electron density is 6.0×1013～1.2× 1014m-3while the discharge current is in arange of 50～120 μA.
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