End-to-End Direct Phase Retrieval From a Single-Frame Interferogram Based on Deep Learning

被引:1
|
作者
Zhang, Tianshan [1 ]
Lu, Mingfeng [1 ]
Hu, Yao [2 ]
Hao, Qun [4 ]
Wu, Jinmin [3 ]
Zhang, Nan [1 ]
Yang, Shuai [4 ]
He, Wenjie [1 ]
Zhang, Feng [1 ]
Tao, Ran [1 ]
机构
[1] Beijing Inst Technol, Sch Informat & Elect, Beijing Key Lab Fract Signals & Syst, Beijing 100081, Peoples R China
[2] Beijing Inst Technol, Sch Opt & Photon, Beijing Key Lab Precis Optoelect Measurement Instr, Beijing 100081, Peoples R China
[3] Beijing Informat Sci & Technol Univ, Sch Automat, Beijing 100101, Peoples R China
[4] Beijing Inst Technol, Sch Opt & Photon, MIIT Key Lab Complex Field Intelligent Explorat, Beijing, Peoples R China
基金
中国国家自然科学基金;
关键词
Deep learning; fringe analysis; optical interferometry; optical metrology; phase retrieval; DEMODULATION;
D O I
10.1109/TIM.2024.3418112
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In the field of optical interferometry, phase retrieval is a critical step in acquiring the phase information of fringes. Various deep-learning-based methods have been proposed for phase retrieval from a single-frame interferogram. However, the existing methods still cannot obtain the unwrapped phase directly without the aid of extra steps. To truly fulfill end-to-end phase retrieval for various fringe patterns, we propose a novel method with carefully crafted network architecture and training methodology. Experimental results on simulated and actual interferograms show excellent accuracy, noise robustness, and demodulation efficiency without any further phase unwrapping or polynomial fitting required by the existing methods. Furthermore, the proposed method is compatible with non-Zernike-polynomial-phase interferograms containing phase discontinuities. These properties have qualified the proposed method for high-standard interferometric measurement for optical fabrication.
引用
收藏
页数:16
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