[1] Anhui Univ, Sch Integrated Circuits, Key Lab Intelligent Comp & Signal Proc, Minist Educ, Hefei 230601, Peoples R China
[2] Huadong Photoelectron IC Inst, Bengbu 233030, Anhui, Peoples R China
[3] Dalian Univ Technol, State Key Lab High Performance Precis Mfg, Dalian 116024, Peoples R China
[4] Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China