Analysis of GAAFET's transient heat transport process based on phonon hydrodynamic equations

被引:1
|
作者
Liu Zhe [1 ,2 ]
Wei Hao [1 ]
Cui Hai-Hang [1 ]
Sun Kai [3 ]
Sun Bo-Hua [2 ,4 ]
机构
[1] Xian Univ Architecture & Technol, Sch Bldg Serv Sci & Engn, Xian 710055, Peoples R China
[2] Xian Univ Architecture & Technol, Inst Mech & Technol, Xian 710055, Peoples R China
[3] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
[4] Chinese Acad Sci, Beijing Inst Nanoenergy & Nanosyst, Beijing 101400, Peoples R China
基金
中国国家自然科学基金;
关键词
gate-all-around field-effect transistor; phonon hydrodynamic model; temperature jump; non-Fourier thermal analysis; THERMAL-CONDUCTIVITY;
D O I
10.7498/aps.73.20240491
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Compared to the classical Fourier's law, the phonon hydrodynamic model has demonstrated significant advantages in describing ultrafast phonon heat transport at the nanoscale. The gate-all-around field-effect transistor (GAAFET) greatly optimizes its electrical performance through its three-dimensional channel design, but its nanoscale characteristics also lead to challenges such as self-heating and localized overheating. Therefore, it is of great significance to study the internal heat transport mechanism of GAAFET devices to obtain the thermal process and heat distribution characteristics. Based on this, this paper conducts theoretical and numerical simulation analyses on the phonon heat transfer characteristics within nanoscale GAAFET devices. Firstly, based on the phonon Boltzmann equation, the phonon hydrodynamic model and boundary conditions are rigorously derived, establishing a numerical solution method based on finite elements. For the novel GAAFET devices, the effects of factors such as surface roughness, channel length, channel radius, gate dielectric, and interface thermal resistance on their heat transfer characteristics are analyzed. The research results indicate that the larger the surface roughness, the smaller the channel length and the channel radius, the larger the interface thermal resistance leads to the higher hot spot peak temperature. The non-Fourier heat analysis method based on the phonon hydrodynamic model and temperature jump condition within the continuous medium framework constructed in this paper can accurately predict the non-Fourier phonon heat conduction process inside GAAFET and reveal the mechanisms of resistive scattering and phonon/interface scattering. This work provides important theoretical support for further optimizing the thermal reliability design of GAAFET, improving its thermal stability, and operational performance.
引用
收藏
页数:9
相关论文
共 42 条
  • [1] Phonon hydrodynamics and phonon-boundary scattering in nanosystems
    Alvarez, F. X.
    Jou, D.
    Sellitto, A.
    [J]. JOURNAL OF APPLIED PHYSICS, 2009, 105 (01)
  • [2] Alvarez P T, 2018, Thermal Transport in Semiconductors: First Principles and Phonon Hydrodynamics, V1st, ppp41
  • [3] Phonon hydrodynamics in frequency-domain thermoreflectance experiments
    Beardo, A.
    Hennessy, M. G.
    Sendra, L.
    Camacho, J.
    Myers, T. G.
    Bafaluy, J.
    Alvarez, F. X.
    [J]. PHYSICAL REVIEW B, 2020, 101 (07)
  • [4] Hydrodynamic Heat Transport in Compact and Holey Silicon Thin Films
    Beardo, A.
    Calvo-Schwarzwalder, M.
    Camacho, J.
    Myers, T. G.
    Torres, P.
    Sendra, L.
    Alvarez, F. X.
    Bafaluy, J.
    [J]. PHYSICAL REVIEW APPLIED, 2019, 11 (03)
  • [5] Drift-diffusion-Poisson- dual phase lag thermal model with phonon scattering in gate all around field effect transistor
    Belkhiria, Maissa
    Alyousef, Haifa A.
    Chehimi, Hanen
    Aouaini, Fatma
    Echouchene, Fraj
    [J]. THIN SOLID FILMS, 2022, 758
  • [6] 2-D-Nonlinear Electrothermal Model for Investigating the Self-Heating Effect in GAAFET Transistors
    Belkhiria, Maissa
    Echouchene, Fraj
    Jaba, Nejeh
    Bajahzar, Abdullah
    Belmabrouk, Hafedh
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2021, 68 (03) : 954 - 961
  • [7] Multidimensional Nano Heat Conduction in Cylindrical Transistors
    Ben Aissa, Mohamed Fadhel
    Nasri, Faouzi
    Belmabrouk, Hafedh
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2017, 64 (12) : 5236 - 5241
  • [8] Equation of motion of a phonon gas and non-Fourier heat conduction
    Cao, Bing-Yang
    Guo, Zeng-Yuan
    [J]. JOURNAL OF APPLIED PHYSICS, 2007, 102 (05)
  • [9] Cattaneo C., 1948, Atti del Seminario Matematico e Fisico dell'Universita di Modena e Reggio Emilia, V3, P83, DOI [10.0000/mailer.oalib.net/references/12487296, DOI 10.0000/MAILER.OALIB.NET/REFERENCES/12487296]
  • [10] Ballistic-diffusive equations for transient heat conduction from nano to macroscales
    Chen, G
    [J]. JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME, 2002, 124 (02): : 320 - 328