Comparative Study on the Effects of O2 Flow Rate on As-Deposited Polycrystalline IAZO Films (vol 1, pg 3348, 2023)

被引：0
|
作者：
Ahmad, Dilshad [1 ,2 ,3 ,4 ]
Zhang, Jing [4 ]
Xu, Jing [1 ,2 ,3 ]
Luo, Jun [1 ,2 ,3 ]
机构：
[1] Chinese Acad Sci, Key Lab Fabricat Technol Integrated Circuits, Beijing 100029, Peoples R China
[2] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
[3] Univ Chinese Acad Sci UCAS, Sch Integrated Circuits, Beijing 100049, Peoples R China
[4] North China Univ Technol, Dept Microelect, Beijing 100144, Peoples R China
来源：
ACS APPLIED ENGINEERING MATERIALS | 2024年 / 2卷 / 10期
关键词：
D O I：
10.1021/acsaenm.4c00593
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：2478 / 2478
页数：1
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