Foundry Fabricated Thin-Film Lithium Niobate Electro-Optic Modulators for Blue Light

被引:0
|
作者
Liu, Tianyi [1 ,2 ]
Ansari, Vahid [1 ]
Bebeti, Engjell [1 ]
Straguzzi, John N. [1 ]
Govdeli, Alperen [1 ,2 ]
Sacher, Wesley D. [1 ]
Poon, Joyce K. S. [1 ,2 ]
机构
[1] Max Planck Inst Microstruct Phys, Weinberg 2, D-06120 Halle, Saale, Germany
[2] Univ Toronto, Dept Elect & Comp Engn, 10 Kings Coll Rd, Toronto, ON M5S 3G4, Canada
关键词
Visible photonics; Thin-film lithium niobate; Electro-optic modulators;
D O I
10.1007/978-3-031-63378-2_17
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We demonstrate a thin-film lithium niobate electro-optic modulator operating at a blue wavelength of lambda = 445 nm. The modulator was fabricated in a generic lithium niobate photonic foundry process on a 150-mm diameter thin-film lithium niobate wafer. The Mach-Zender modulator has 1.9-mm long phase shifters and exhibits a low half-wave voltage of 1.80 V, a high extinction ratio >15 dB, and an estimated device insertion loss of 3 dB.
引用
收藏
页码:97 / 101
页数:5
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