A MEMS-Type Ionization Vacuum Sensor With a Wide Measurement Range

被引：2
|
作者：
Zhao, Yanqing [1 ]
Li, Zhiwei [1 ]
He, Yidan [1 ]
Mao, Shuyu [1 ]
Guo, Dengzhu [1 ]
Wei, Xianlong [1 ]
机构：
[1] Peking Univ, Sch Elect, Key Lab Phys & Chem Nanodevices, Beijing 100871, Peoples R China
来源：
IEEE ELECTRON DEVICE LETTERS | 2024年 / 45卷 / 05期
基金：
中国国家自然科学基金;
关键词：
Current measurement; Electron sources; Voltage measurement; Thermionic emission; Silicon; Pressure measurement; Impact ionization; Ionization vacuum sensor; microelectromechanical system (MEMS); yttrium oxide; thermionic emission;
D O I：
10.1109/LED.2024.3382769
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The letter presents a MEMS-type ionization vacuum sensor based on electron emission from an on-chip thermionic electron source. The sensor employs a multilayer-stacked structure fabricated by anodic bonding technology, showing overall dimensions of 12 x 12 x 3.3 mm(3). Because of the efficient and stable electron emission of an yttrium oxide electron source, the sensor exhibits a wide linear response range from 1 x 10(-4) Pa to 100 Pa with a good repeatability, covering both high and medium vacuum regimes. It provides a new miniature vacuum sensor with a wide measurement range.
引用
收藏
页码：909 / 912
页数：4
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