Big Data Analytics for Real Time Dispatch

Semiconductor manufacturing industry is leading industry in generating large volume of data because of its complexities of processes and automated nature. It not only produces data in big volume but in an immense variety of formats at a rapid pace through various components in a semiconductor manufacturing facility (Fab). Real Time Dispatch (RTD) is a component in the automated fab which takes decisions to dispatch lots to tools in real time. It generates tons of dispatching data. Traditional database management system is not able to manage such volume and variety of data. This study will present a solution or framework to collect, store and retrieve real time dispatch data efficiently in a semiconductor fab and utilize it for the improvement of fab operations. This is important because dispatching data can be used in many ways to improve dispatching rules and algorithms for tools, troubleshoot undesirable dispatching decisions quickly and easily and measure and monitor key performance indicators (KPIs) for tools and the fab.