Lensless single-shot dual-wavelength digital holography for industrial metrology

被引：0
|
作者：
Shangguan, Huangcheng [1 ]
Urbach, H. Paul [1 ]
Kalkman, Jeroen [1 ]
机构：
[1] Delft Univ Technol, Dept Imaging Phys, Lorentzweg 1, NL-2628 CJ Delft, Netherlands
来源：
APPLIED OPTICS | 2024年 / 63卷 / 16期
关键词：
PHASE SENSITIVITY; MICROSCOPY; RECONSTRUCTION; NOISE;
D O I：
10.1364/AO.519491
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We demonstrate lensless single-shot dual-wavelength digital holography for high-speed 3D imaging in industrial inspection. Single-shot measurement is realized by combining off-axis digital holography and spatial frequency multiplexing of the two wavelengths on the detector. The system has 9.1 mu m lateral resolution and a 50 mu m unambiguous depth range. We determine the theoretical accuracy of off-axis dual-wavelength phase reconstruction for the case of shot-noise-limited detection. Experimental results show good agreement with the proposed model. The system is applied to industrial metrology of calibrated test samples and chip manufacturing.
引用
收藏
页码：4427 / 4434
页数：8
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