Electron-Beam Evaporated Superconducting Titanium Thin Films for Antenna-Coupled Transition Edge Sensors

被引：24
|
作者：
Wang, Zheng [1 ,2 ]
Zhang, Wen [1 ,2 ]
Miao, Wei [1 ,2 ]
Liu, Dong [1 ,2 ]
Zhong, Jia-Qiang [1 ,2 ]
Shi, Sheng-Cai [1 ,2 ,3 ]
机构：
[1] Chinese Acad Sci, Purple Mt Observ, Nanjing 210008, Jiangsu, Peoples R China
[2] Chinese Acad Sci, Key Lab Radio Astron, Nanjing 210008, Jiangsu, Peoples R China
[3] Univ Sci & Technol China, Hefei 230026, Anhui, Peoples R China
来源：
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 2018年 / 28卷 / 04期
关键词：
Electron beams; superconducting thin films; thin film sensors; titanium;
D O I：
10.1109/TASC.2018.2799418
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Superconducting titanium thin films are good candidates for transition edge sensors. In this paper, we deposit titanium thin films on cooled silicon-on-insulator substrates by using electron-beam evaporation. The deposition rate dependence of the film stress, resistivity, and superconducting transition temperature are presented and analyzed. The relationship between film electrical properties and thickness is discussed. For investigating the heating influence on thin Ti films, a depth profile of oxygen diffusion in the films is also analyzed by X-ray photoelectron spectroscopy.
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页数：4
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