A Differential Surface Acoustic Wave Magnetic Field Sensor With Temperature Compensation

被引：0
|
作者：
Yang, Yang [1 ]
Liu, Huiling [2 ]
Sun, Hao [3 ]
Zhang, Qiaozhen [1 ]
机构：
[1] Shanghai Normal Univ, Coll Informat Mech & Elect Engn, Shanghai, Peoples R China
[2] Shanghai Univ, Coll Microelect, Shanghai, Peoples R China
[3] Chinese Acad Sci, Shanghai Inst Microsystem & Informat Technol, Inst Ctr Shared Technol & Facil, Shanghai, Peoples R China
来源：
2024 IEEE MTT-S INTERNATIONAL CONFERENCE ON MICROWAVE ACOUSTICS & MECHANICS, IC-MAM | 2024年
关键词：
surface acoustic wave; differential magnetic field sensor;
D O I：
10.1109/IC-MAM60575.2024.10539049
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Surface acoustic waves (SAW) magnetic field sensors are promising in magnetic field and electric current detection applications. Acoustic waves have different frequency-magnetic field responses when SAWs propagate along on the hard axis and easy axis of the magnetic film, respectively. Here, we theoretically investigate an integrated differential SAW magnetic field sensor that consists of two SAW resonators based on the CoFeB/SiO2/quartz structure. By designing the angle between SAW propagation directions of two SAW resonators and the hard axis of the magnetic film, the magnetic field sensitivity of the SAW magnetic field sensor is improved theoretically. The thermal stability of the differential SAW magnetic field sensor is also improved. The results are beneficial for developing SAW magnetic field sensors with high sensitivities.
引用
收藏
页码：81 / 84
页数：4
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