Challenges and prospects of ammonothermal GaN crystal growth and substrate fabrication

被引:0
|
作者
Grabianska, K. [1 ]
Kucharski, R. [1 ]
Bockowski, M. [1 ,2 ]
机构
[1] PAS, Inst High Pressure Phys, Sokolowska 29-37, PL-01142 Warsaw, Poland
[2] Nagoya Univ, Inst Mat & Syst Sustainabil, Ctr Integrated Res Future Elect, C3-1 Furo Cho,Chikusa Ku, Nagoya, Aichi 4648603, Japan
来源
关键词
Ammonothermal method; Bulk growth; Gallium nitride; Substrate; Crystallization;
D O I
10.1117/12.3000034
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Gallium nitride (GaN) crystals of the best structural quality are grown by ammonothermal method in a supercritical ammonia solution inside high pressure autoclaves. This lecture will focus on the basic ammonothermal growth. The growth mechanism in different crystallographic directions, growth morphology and structural quality of GaN crystals, will be discussed. Structural properties and shape of the seeds will be shown. The influence of the crystallization run parameters, the internal configuration of the autoclave and the structural quality of the obtained GaN will be discussed. The path from bulk crystal to finished substrate of GaN will be presented. All challenges and difficulties to grown bulk GaN from ammonothermal method will be demonstrated. Scenarios for the further development of bulk GaN crystallization will be presented.
引用
收藏
页数:2
相关论文
共 50 条
  • [1] Prospects for the ammonothermal growth of large GaN crystal
    Fukuda, Tsuguo
    Ehrentraut, Dirk
    JOURNAL OF CRYSTAL GROWTH, 2007, 305 (02) : 304 - 310
  • [2] Numerical Simulation of Ammonothermal Crystal Growth of GaN-Current State, Challenges, and Prospects
    Schimmel, Saskia
    Tomida, Daisuke
    Ishiguro, Tohru
    Honda, Yoshio
    Chichibu, Shigefusa
    Amano, Hiroshi
    CRYSTALS, 2021, 11 (04):
  • [3] Crystal growth of GaN by ammonothermal method
    Yoshikawa, A
    Ohshima, E
    Fukuda, T
    Tsuji, H
    Oshima, K
    JOURNAL OF CRYSTAL GROWTH, 2004, 260 (1-2) : 67 - 72
  • [4] Improvement of crystal quality in ammonothermal growth of bulk GaN
    Hashimoto, Tadao
    Letts, Edward
    Ikari, Masanori
    Nojima, Yoshihiro
    JOURNAL OF CRYSTAL GROWTH, 2010, 312 (18) : 2503 - 2506
  • [5] Current Status and Future Prospects of Ammonothermal Bulk GaN Growth
    Hashimoto, Tadao
    Letts, Edward
    Hoff, Sierra
    SENSORS AND MATERIALS, 2013, 25 (03) : 155 - 164
  • [6] Ammonothermal growth of GaN on a self-nucleated GaN seed crystal
    Bao, Quanxi
    Saito, Makoto
    Hazu, Kouji
    Kagamitani, Yuji
    Kurimoto, Kouhei
    Tomida, Daisuke
    Qiao, Kun
    Ishiguro, Tohru
    Yokoyama, Chiaki
    Chichibu, Shigefusa F.
    JOURNAL OF CRYSTAL GROWTH, 2014, 404 : 168 - 171
  • [7] Recent progress in basic ammonothermal GaN crystal growth
    Grabianska, K.
    Kucharski, R.
    Puchalski, A.
    Sochacki, T.
    Bockowski, M.
    JOURNAL OF CRYSTAL GROWTH, 2020, 547 (547)
  • [8] Challenges and future perspectives in HVPE-GaN growth on ammonothermal GaN seeds
    Bockowski, M.
    Iwinska, M.
    Amilusik, M.
    Fijalkowski, M.
    Lucznik, B.
    Sochacki, T.
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2016, 31 (09)
  • [9] Intermediates in Ammonothermal GaN Crystal Growth under Ammonoacidic Conditions
    Zhang, Shiyu
    Hintze, Frauke
    Schnick, Wolfgang
    Niewa, Rainer
    EUROPEAN JOURNAL OF INORGANIC CHEMISTRY, 2013, 2013 (31) : 5387 - 5399
  • [10] Ammonothermal growth of bulk GaN
    Hashimoto, Tadao
    Wu, Feng
    Speck, James S.
    Nakamura, Shuji
    JOURNAL OF CRYSTAL GROWTH, 2008, 310 (17) : 3907 - 3910