Detector-integrated vertical-cavity surface-emitting laser with a movable high-contrast grating mirror

被引：0
|
作者：
Wang, Minglu [1 ,2 ,3 ]
Peng, Hongling [4 ]
Hao, Chenxi [1 ,2 ]
Zhou, Xuyan [4 ]
Zheng, Wanhua [2 ,4 ]
Liu, Anjin [1 ,2 ]
机构：
[1] Chinese Acad Sci, Inst Semicond, Key Lab Optoelect Mat & Devices, Beijing 100083, Peoples R China
[2] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
[3] Univ Chinese Acad Sci, Sch Elect Elect & Commun Engn, Beijing 100049, Peoples R China
[4] Chinese Acad Sci, Inst Semicond, Key Lab Solid State Optoelect Informat Technol, Beijing 100083, Peoples R China
来源：
PHOTONICS RESEARCH | 2024年 / 12卷 / 07期
基金：
中国国家自然科学基金;
关键词：
SILICON PHOTONICS; SWEPT-SOURCE; HIGH-SPEED; VCSEL; SPECTROSCOPY; EMISSION; INDEX; ARRAY;
D O I：
10.1364/PRJ.519679
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In this paper, we present a detector-integrated vertical-cavity surface-emitting laser (VCSEL) with a movable highcontrast grating (HCG) mirror in an n-i-p-i-n manner. The detector-integrated VCSEL with a movable HCG can achieve three functions, including wavelength tuning, power monitoring, and resonant-cavity-enhanced (RCE) photon detection. Currently, the device can achieve a wavelength tuning range of 27 nm at room temperature when the suspended HCG is driven by the reverse-bias voltage. The n-i-p structure located at the upper part of the device can serve as an intra-cavity photodiode to monitor the output power due to the defect absorption. The RCE photon detection function of the detector-integrated VCSEL with a movable HCG is measured, and it has a peak responsivity at about 926 nm. This detector-integrated VCSEL with a movable HCG will be useful for sensing and imaging. (c) 2024 Chinese Laser Press
引用
收藏
页码：1437 / 1448
页数：12
相关论文
共 50 条
  • [1] Detector-integrated vertical-cavity surfaceemitting laser with a movable high-contrast grating mirror
    MINGLU WANG
    HONGLING PENG
    CHENXI HAO
    XUYAN ZHOU
    WANHUA ZHENG
    ANJIN LIU
    [J]. Photonics Research., 2024, 12 (07) - 1448
  • [2] GaN vertical-cavity surface-emitting laser with a high-contrast grating reflector
    Chang, Tsu-Chi
    Kuo, Shuo-Yi
    Hashemi, Ehsan
    Haglund, Asa
    Lu, Tien-Chang
    [J]. HIGH CONTRAST METASTRUCTURES VII, 2018, 10542
  • [3] Quantum-cascade vertical-cavity surface-emitting laser integrated with monolithic high-contrast grating
    Czyszanowski, Tomasz
    Grzempa, Sandra
    Dems, Maciej
    Nakwaski, Wlodzimierz
    [J]. VERTICAL-CAVITY SURFACE-EMITTING LASERS XXII, 2018, 10552
  • [4] Long-Wavelength High-Contrast Grating Vertical-Cavity Surface-Emitting Laser
    Hofmann, Werner
    Chase, Chris
    Mueller, Michael
    Rao, Yi
    Grasse, Christian
    Boehm, Gerhard
    Amann, Markus-Christian
    Chang-Hasnain, Connie J.
    [J]. IEEE PHOTONICS JOURNAL, 2010, 2 (03): : 415 - 422
  • [5] The Vertical-Cavity Surface-Emitting Laser Incorporating a High Contrast Grating Mirror as a Sensing Device
    Marciniak, Magdalena
    Gebski, Marcin
    Piskorski, Lukasz
    Dems, Maciej
    Wasiak, M.
    Panajotov, Krassimir
    Lott, James A.
    Czyszanowski, Tomasz
    [J]. VERTICAL-CAVITY SURFACE-EMITTING LASERS XXII, 2018, 10552
  • [6] High-Contrast Grating reflectors for 980 nm Vertical-Cavity Surface-Emitting Lasers
    Gebski, M.
    Kuzior, O.
    Wasiak, M.
    Szerling, A.
    Wojcik-Jedlinska, A.
    Palka, N.
    Dems, M.
    Xie, Y. Y.
    Xu, Z. J.
    Wang, Q. J.
    Zhang, D. H.
    Czyszanowski, T.
    [J]. High Contrast Metastructures IV, 2015, 9372
  • [7] Wavelength Trimming of Vertical-Cavity Surface-Emitting Lasers with High-Contrast Subwavelength Grating
    Gu, Xiaodong
    Imamura, Akihiro
    Koyama, Fumio
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2011, 50 (10)
  • [8] Vertical-cavity surface-emitting laser with integrated surface grating for high birefringence splitting
    Pusch, T.
    Debernardi, P.
    Lindemann, M.
    Erb, F.
    Gerhardt, N. C.
    Hofmann, M. R.
    Michalzik, R.
    [J]. ELECTRONICS LETTERS, 2019, 55 (19) : 1055 - +
  • [9] Dynamics of high-contrast grating vertical-cavity surface-emitting laser with lateral optical feedback by a heterostructure interface
    Hao, Chenxi
    Zhang, Jing
    Zheng, Wanhua
    Liu, Anjin
    [J]. OPTICS EXPRESS, 2022, 30 (12) : 22074 - 22087
  • [10] High-Contrast Grating Structure Design for Liquid Crystal Tunable Vertical-Cavity Surface-Emitting Lasers
    Zheng Zhou
    Zou Yonggang
    Shi Linlin
    Fang Junyu
    Wang Haizhu
    Fan Jie
    Cui Chao
    Xu Li
    Ma Xiaohui
    [J]. LASER & OPTOELECTRONICS PROGRESS, 2020, 57 (01)
12345