Wafer-Scale Fabrication of Wearable All-Carbon Nanotube Photodetector Arrays

被引:0
|
作者
Liu, Peng [1 ,2 ]
Ding, Er-Xiong [2 ]
Xu, Zhenyu [1 ]
Cui, Xiaoqi [2 ]
Du, Mingde [2 ]
Zeng, Weijun [1 ,3 ]
Karakassides, Anastasios [1 ]
Zhang, Jin [2 ]
Zhang, Qiang [1 ]
Ahmed, Faisal [2 ]
Jiang, Hua [1 ]
Hakonen, Pertti [1 ,3 ]
Lipsanen, Harri [2 ]
Sun, Zhipei [2 ,3 ]
Kauppinen, Esko I. [1 ]
机构
[1] Aalto Univ, Dept Appl Phys, FI-00076 Espoo, Finland
[2] Aalto Univ, Dept Elect & Nanoengn, FI-00076 Espoo, Finland
[3] Aalto Univ, QTF Ctr Excellence, Dept Appl Phys, FI-00076 Espoo, Finland
基金
欧盟地平线“2020”; 欧洲研究理事会;
关键词
lithography-free; chemical-free; wearable electronics; all-carbon nanotube devices; photodetector;
D O I
10.1021/acsnano.4c01087
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
With electronic devices evolving toward portable and high-performance wearables, the constraints of complex and wet processing technologies become apparent. This study presents a scalable photolithography/chemical-free method for crafting wearable all-carbon nanotube (CNT) photodetector device arrays. Laser-assisted patterning and dry deposition techniques directly assemble gas-phase CNTs into flexible devices without any lithography or lift-off processes. The resulting wafer-scale all-CNT photodetector arrays showcase excellent uniformity, wearability, environmental stability, and notable broadband photoresponse, boasting a high responsivity of 44 AW(-1) and a simultaneous detectivity of 1.9 x 10(9) Jones. This research provides an efficient, versatile, and scalable strategy for manufacturing wearable all-CNT device arrays, allowing widespread adoption in wearable optoelectronics and multifunctional sensors.
引用
收藏
页码:18900 / 18909
页数:10
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