Optimizing HVAC systems for semiconductor fabrication: A data-intensive framework for energy efficiency and sustainability

This paper presents a detailed comparative analysis of the performance and energy consumption of heating, ventilation, and air conditioning (HVAC) systems as standalone units and integrated systems, specifically focusing on semiconductor manufacturing facilities (SMFs). Highlighting the urgent need for HVAC system optimization to minimize energy waste and reduce greenhouse gas emissions, the study uncovers distinct energy consumption patterns across residential, commercial, and industrial sectors, emphasizing the unique needs of SMFs. It reveals the need for more current energy codes and standards in addressing the specialized energy demands of semiconductor fabrication plants (fabs), thereby advocating for a customized HVAC energy-design framework to enhance energy efficiency within these facilities. The research is divided into three main segments: (1) identifying the key factors that drive HVAC systems' energy consumption, (2) examining the factors that influence system performance, and (3) analyzing how these factors impact the optimization of HVAC systems in SMFs. By developing a framework that integrates design, engineering, and energy consumption data, the paper lays the groundwork for a dataintensive design approach tailor-made to meet the energy efficiency requirements of semiconductor fabs. The study's pivotal findings highlight the deficiencies of existing energy codes and standards for SMFs and propose a bespoke HVAC energy design framework. This strategy identifies critical energy consumption and performance factors unique to SMFs, recommending a datadriven design method for enhanced energy efficiency. This forward-thinking approach aims to significantly reduce energy waste and greenhouse gas emissions, establishing a new benchmark for sustainable practices in semiconductor manufacturing.