共 11 条
- [1] Micro-machined piezoelectric membrane-based immunosensor array BIOSENSORS & BIOELECTRONICS, 2008, 24 (04): : 638 - 643
- [2] A Piezoelectric Micro-Machined Ultrasonic Transducer Array Based On Flexible Substrate 2018 13TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS 2018), 2018, : 345 - 348
- [3] The Research of Vibration Suppression Method for Silicon Micro-machined Gyro Driven by the Rotation Aircraft PROCEEDINGS OF THE 2ND INTERNATIONAL CONFERENCE ON ELECTRONIC & MECHANICAL ENGINEERING AND INFORMATION TECHNOLOGY (EMEIT-2012), 2012, 23
- [5] An AlN-based Piezoelectric Micro-machined Ultrasonic Transducer (pMUT) Array 2016 IEEE 16TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO), 2016, : 731 - 734
- [6] A PZT-driven atomizer based on a vibrating flexible membrane and a micro-machined trumpet-shaped nozzle array MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2009, 15 (06): : 865 - 873
- [7] A PZT-driven atomizer based on a vibrating flexible membrane and a micro-machined trumpet-shaped nozzle array Microsystem Technologies, 2009, 15 : 865 - 873
- [8] Sensitive thermal flow sensor based on a micro-machined two dimensional resistor array TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2001, : 1436 - 1439
- [9] An electronic nose system based on a micro-machined gas sensor array to assess the freshness of sardines SENSORS AND ACTUATORS B-CHEMICAL, 2009, 141 (02): : 538 - 543
- [10] Effect of Shared Cavity on Electromechanical Performance of Piezoelectric Based Micro-machined Ultrasonic Transducer Array 2019 14TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE-NEMS 2019), 2019, : 482 - 487