[1] Zhejiang Univ, State Key Lab Silicon & Adv Semicond Mat, Hangzhou 310027, Peoples R China
[2] Zhejiang Univ, Sch Mat Sci & Engn, Hangzhou 310027, Peoples R China
[3] Shangyu Inst Semicond Mat, Shaoxing 312300, Peoples R China
[4] Shanxi Zheda Inst Adv Mat & Chem Engn, Taiyuan 030024, Peoples R China