Microstructure, mechanical properties, and wear behaviors of CrSiN films on oxynitriding-treated Vanadis 60 high-speed steel by the direct current magnetron sputtering process

This study utilized the direct current magnetron sputtering technique within the physical vapor deposition process to apply a chrome silicon nitride (CrSiN) coating onto the oxynitrided surface of Vanadis 60 high-speed steel. The experimental parameters include various deposition bias voltages (0, -25, -50, -75, and -100 V), a gas flow rate of 45/30 (Ar/N 2 ) sccm, a power of 100 W, a voltage of 400 V, a deposition time of 2.5 h, and a deposition temperature of 225 degrees C. The research results show that the substrate formed an oxynitriding layer with a thickness of about 30 mu m, while the surface hardness increased to about 1300 HV 0.05 . When the coatings were deposited at a bias voltage of -100 V, the CrSiN coatings possessed the highest hardness (5.74 GPa) and elastic modulus (110.94 GPa), thus, it had the best wear resistance (specific wear rate was 1.19x10 - 5 , and 7.29x10 - 5 mm 3 center dot m - 1 center dot N -1 under the loads of 1.5 N and 3 N), and good corrosion resistance (corrosion current was 3.28x10 - 5 A center dot cm - 2 , and polarization resistance was 793.18 Omega center dot cm 2 in a 0.1 N H 2 SO 4 solution). Furthermore, transmission electron microscopy observations confirm that the CrSiN coatings had a significant amorphous structure.