Asymmetry Degradation Behavior Under Forward and Backward Overlap Dynamical Stress in Large-Size Amorphous InGaZnO TFT

被引:0
|
作者
Duan, Ruohong [1 ,2 ]
Zou, Zhixiang [3 ]
Xu, Zhong [3 ]
Zhang, Haoxiong [3 ]
Shao, Xibin [3 ]
Zhang, Deming [1 ,2 ]
Wang, Zhangtao [3 ]
Zeng, Lang [1 ,2 ]
机构
[1] Beihang Univ, Fert Beijing Inst, Sch Integrated Circuit Sci & Engn, MIIT Key Lab Spintron, Beijing 100191, Peoples R China
[2] Beihang Univ, Hangzhou Int Innovat Inst, Natl Key Lab Spintron, Hangzhou 31115, Peoples R China
[3] BOE Technol Corp, Hefei 230012, Peoples R China
基金
中国国家自然科学基金; 北京市自然科学基金;
关键词
Stress; Degradation; Transistors; Logic gates; Threshold voltage; Temperature measurement; Voltage measurement; Amorphous InGaZnO (a-IGZO); asymmetry degradation; dynamical stress; hot carrier degradation; self-heating effect; THRESHOLD VOLTAGE SHIFT; THIN-FILM TRANSISTORS; POLYCRYSTALLINE-SILICON; DEVICE DEGRADATION; MODEL;
D O I
10.1109/TED.2024.3435174
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, the degradation behaviors for large size amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs) under realistic waveforms in active driving circuit are revealed, and the corresponding degradation mechanisms are analyzed. When the back half of the drain pulse overlaps with the first half of the gate pulse (forward overlap), self-heating effect becomes the key factor for positive threshold voltage shift. When the front half of the drain pulse overlaps with the back half of the gate pulse (backward overlap), hot carrier effect takes the dominating role over self-heating. Under this circumstance, hot carrier effect could generate deep states, which are hard to recover, causing both positive voltage shift and ON-current deterioration. However, slightly increasing the pulse frequency leads to self-heating effect taking over again in backward overlap. To understand this phenomenon, a competition model between self-heating and hot carrier effect is proposed, which indicates the significant role played by the large W/L ratio of the a-IGZO driving transistor. The model might be suitable for degradation analysis of a-IGZO TFTs in gate driven on array (GOA) driving circuits application.
引用
收藏
页码:5443 / 5449
页数:7
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