Theoretical model of glow discharge plasma

被引:0
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作者
郭小明
周庭东
白秀庭
机构
[1] Department of Electrical Engineering
[2] Tsinghua University
[3] Beijing
[4] China
[5] Beijing
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摘要
<正> The physical model for glow discharge plasma has been modified. The modified model is also analytic and self-consistent. Electron density distribution under the conditions of longer gap separations and different working gas pressures has been analyzed, and comparison between theory and experiment has been made. The modified model has wider applications, and the theoretical results are in better agreement with the experimental.
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页数:7
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