Discussion on vibration parameters of the simplified dynamic model of an atomic force microscope

被引：0

作者：

Bin F. ^{[1
]}

Guan R. ^{[1
]}

Liu G. ^{[1
]}

Zeng Y. ^{[1
]}

Wei Z. ^{[1
]}

机构：

[1] College of Mechanical and Electrical Engineering, Beijing University of Chemical Technology, Beijing

来源：

Zhendong yu Chongji/Journal of Vibration and Shock | 2023年 / 42卷 / 06期

关键词：

atomic; equivalent damping; equivalent mass; force microscope; spring vibrator;

D O I：

10.13465/j.cnki.jvs.2023.06.029

中图分类号：

学科分类号：

摘要：

Euler-Bernoulli beam model and one -dimensional spring oscillator model are the theoretical basis for the dynamic analysis of an atomic force microscope ( AFM ). A new method for calculating the equivalent damping was proposed, and the equivalent mass, equivalent stiffness and equivalent damping simplified from the Euler-Bernoulli beam model to one-dimensional spring vibrator model were calculated using two simplifying methods ： the method of deflection curve function and the method of first-order vibration mode function, and the results of the two simplifying methods were compared. On the basis of equivalent parameters ' the response amplitude of a cantilever beam excited by fixed end displacement was further discussed. Finally, the frequency sweep experiment of a needle free probe away from the sample was designed. The experimental results show that the theoretical results obtained by the simplifying method of first-order mode function are in good agreement with the experiment results. The results provide a theoretical reference for the study of the kinetic properties of atomic, force microscopes. © 2023 Chinese Vibration Engineering Society. All rights reserved.

引用

页码：240 / 247

页数：7

共 32 条

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