Micro/nanopositioning coplanar stage with real-time compensation of volumetric error

被引：0
|
作者：
Cai, Yindi [1 ,2 ]
Zhang, Zeguang [2 ]
Zhang, Dianpeng [2 ]
Wang, Ruyue [2 ]
Fan, Kuang-Chao [2 ]
机构：
[1] State Key Laboratory of High-performance Precision Manufacturing, School of Mechanical Engineering, Dalian University of Technology, Dalian,116023, China
[2] Key Laboratory for Micro/Nano Technology and System of Liaoning Province, School of Mechanical Engineering, Dalian University of Technology, Dalian,116023, China
来源：
Measurement: Journal of the International Measurement Confederation | 2024年 / 229卷
基金：
中国国家自然科学基金;
关键词：
33;
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