Research of Al2O3/sioxny/sinx laminated structure on efficiency and LID of PERC solar cells

被引：0
|
作者：
Fan J. [1 ,2 ]
Chen D. [2 ]
Xu L. [1 ]
Yang Y. [1 ]
Zhou H. [1 ]
机构：
[1] College of Mechanical and Elctronic Engineering, Nanjing Forestry University, Nanjing
[2] State Key Laboratory of PV Science and Technology, Trina Solar Co. Ltd., Changzhou
来源：
Taiyangneng Xuebao/Acta Energiae Solaris Sinica | 2022年 / 43卷 / 07期
关键词：
Field passivation; Laminated film; LID; PERC solar cells; Rear passivation; SiO[!sub]x[!/sub]N[!sub]y[!/sub;
D O I：
10.19912/j.0254-0096.tynxb.2020-1145
中图分类号：
学科分类号：
摘要：
Due to a large number of H atoms, the SiOxNy film prepared by PECVD has shown excellent surface passivation performance. By inserting a layer of SiOxNy film between the Al2O3/SiNx rear passivation structure of PERC solar cells, Al2O3/SiOxNy/SiNx is formed, which can avoid the negative effect of the fixed positive charge carried by SiNx on the negative charge field passivation effect of Al2O3. As a result, the silicon minority carrier lifetime increased from 130 μs to 162 μs, and the cell conversion efficiency increased by 0.09%. The LID of the PERC cell based on Al2O3/SiOxNy/SiNx rear passivation structure was also improved, decreasing from 1.83% in the control group to 1.09% in the experimental group. © 2022, Solar Energy Periodical Office Co., Ltd. All right reserved.
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页码：122 / 127
页数：5
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