Effect of C2H2/Ar Flow Rate on Microstructure and Tribological Properties of a-C:H Coatings

被引：0
|
作者：
Yan M. [1 ,2 ]
Yan Z. [1 ,3 ]
Wang X. [1 ,2 ]
Lu X. [1 ,3 ]
Sui X. [1 ,3 ]
Hao J. [1 ]
Liu W. [1 ]
机构：
[1] State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou
[2] University of Chinese Academy of Sciences, Beijing
[3] Qingdao Center of Resource Chemistry and New Materials, Qingdao
来源：
Mocaxue Xuebao/Tribology | 2022年 / 42卷 / 03期
基金：
中国国家自然科学基金; 中国科学院西部之光基金;
关键词：
A-C:H coating; Friction coefficient; Mechanical properties; Microstructure; Wear rate;
D O I：
10.16078/j.tribology.2021029
中图分类号：
学科分类号：
摘要：
a-C:H coatings have widely used as the surface protection material in different applications due to their high hardness, low friction coefficient and good chemical inertness, while the H content and sp2C/sp3C ratio in the a-C:H coatings are the key factors to affect the mechanical and tribological properties of the coatings. In this study, the a-C:H coatings were prepared on the surface of 9Cr18 steel substate via unbalanced magnetron sputtering technology, and the influences of precursor composition on the H content, microstructure, mechanical and tribological properties of the coatings were systematically studied. The results showed that the growth rate and H content of the a-C:H coatings monotonically increased as the increase of C2H2/Ar flow rate ratio, while the compactness decreased. The hardness and elastic modulus gradually decreased as a function of the C2H2/Ar flow rate ratio owing to the variation of the C-H bonds contents and compactness of the a-C:H coatings, but the adhesion strength between the substrates and coatings displayed a trend of first increased and then decreased. The coatings exhibited good friction and wear performances when the C2H2/Ar flow rate ratio was below 4:3, but the friction coefficient and wear rate of the coating significantly increased when the ratio was higher than the value. Overall, with the increase of the C2H2/Ar flow rate ratio, the friction coefficient and wear rate of the a-C:H coatings always decreased at first and then increased. Moreover, the main wear mechanisms of the a-C:H coatings were changed from the abrasive wear and adhesive wear to single abrasive wear as a result of the passivation effect of H atoms and changes of mechanical properties. In the case of C2H2/Ar flow rate ratio of 1:1, the a-C:H coatings had the lowest average friction coefficient and wear rate, and the values were 0.1 and 8.0×10-8 mm3/(N·m), respectively. This property superiority of the a-C:H coating was closely related to the H content and sp2C/sp3C ratio in the coating. Copyright ©2022 Tribology. All rights reserved.
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页码：588 / 597
页数：9
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